Publications

2001

Fletcher, D.A., Crozier, K.B., Quate, C.F., Kino, G.S., Goodson, K.E., Simanovskii, D., Palanker, D.V., 2001, “Refraction Contrast Imaging with a Scanning Microlens,” Applied Physics Letters, Vol. 78, pp. 3589-3591.

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Fletcher, D.A., Crozier, K.B., Guarini, K.W., Minne, S.C., Kino, G.S., Quate, C.F., and Goodson, K.E., 2001, “Microfabricated Silicon Solid Immersion Lens,” IEEE/ASME Journal of MicroElectroMechanical Engineering, Vol. 10, pp. 450-459.

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Fletcher, D.A., Goodson, K.E., and Kino, G.S., 2001, “Focussing in Microlenses Close to a Wavelength in Diameter,” Optics Letters, Vol. 26, pp. 399-401.

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Touzelbaev, M.N., Zhou, P., Venkatasubramanian, R., Goodson, K.E., 2001, “Thermal Characterization of Bi2Te3/Sb2Te3 Superlattices,” Journal of Applied Physics, Vol. 90, pp. 763-767.

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Sverdrup, P.G., Sinha, S., Uma, S., Asheghi, M., and Goodson, K.E., 2001, “Measurement of Ballistic Phonon Conduction Near Hotspots in Silicon,” Applied Physics Letters, Vol. 78, pp. 3331-3333.

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King, W.P., Kenny, T.W., Goodson, K.E., Cross, G., Despont, M., Durig, U., Rothuizen, H., Binnig, G.K., and Vettiger, P., 2001, “Atomic Force Microscope Cantilevers for Combined Thermomechanical Data Writing and Reading,” Applied Physics Letters, Vol. 78, pp. 1300-1302.

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Uma, S., McConnell, A.D., Asheghi, M., Kurabayashi, K., and Goodson, K.E., 2001, “Temperature Dependent Thermal Conductivity of Undoped Polycrystalline Silicon Layers,” International Journal of Thermophysics, Vol. 22, pp. 605-616.

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Laser, D., Goodson, K.E., Santiago, J.G., Kenny, T.W., 2001, "Impact of Pumping Surface Separation Distance on Micromachined Silicon Electrokinetic Pump Performance", 2001 ASME International Mechanical Engineering Congress and Exhibition, New York (2001).

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L. Zhang, E.N. Wang, J. Koch, J.Liu, J-M. Koo, L. Jiang, K.E. Goodson, J.G. Santiago, T.W. Kenny, "Microscale Liquid Impingement Cooling", 2001 ASME International Mechanical Engineering Congress and Exhibition, New York (2001).

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King, W.P., and Goodson, K.E., 2001, "Modeling and Simulation of Nanometer-Scale Thermomechanical Data Bit Formation," Proceedings of the ASME National Heat Transfer Conference, Anaheim, CA, June 10-12.

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Zhang, L., Koo, J.-M., Jiang, L., Goodson, K.E., Santiago, J.G., and Kenny, T.W., 2001, "Study of Boiling Regimes and Transient Signal Measurements in Microchannels," Proc. Solid State Sensors and Actuators Workshop (Transducers), Munich, Germany, June, pp. 1514-1517.

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Jiang, L., Koo, J.M., Zeng, S., Zhang, L., Banerjee S., Zhou P., Santiago J.G., Kenny T.W., Goodson K.E., 2001, "An Electrokinetic Closed-Loop Micro Cooler for High-Power VLSI Chips," presented at SEMI-THERM, San Jose, CA, USA, March.

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King, W.P., and Goodson, K.E., 2001, "Thermal Writing and Nanoimaging with Heated Atomic Force microscope Cantilevers," presented at the Heat Transfer Photogallery at the ASME International Mechanical Engineering Congress and Exposition, November 12-16.

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Cross, G.L.W., Despont, M., Drechsler, U., Durig, U., Vettiger, P., King, W.P., and Goodson, K.E, 2001, "Thermomechanical Formation and Thermal Sensing of Nanometer-Scale Indentations in PMMA Thin Films for Parallel and Dense AFM Data Storage," Fundamentals of Nanoindentation and Nanotribology II, Materials Research Society Symposium Proceedings, 649.

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Chu, D., Touzelbaev, M., Goodson, K.E., Babin, S., Pease, R.F., 2001, "Thermal Conductivity Measurements for Resist Thin Film," presented at the International Symposium on Electron, Ion and Photon Beam Technology and Nanofabrication, Washington DC.

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Laser, D., Yao, S., Chen, C.H., Mikkelsen, J., Goodson, K.E., Santiago, J.G., and Kenny, T.W., 2001, "A Micromachined Silicon Low-Voltage Parallel-Plate Electrokinetic Pump," Proc. Solid State Sensors and Actuators Workshop (Transducers), Munich, Germany, p. 330.

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Koo, J.M., Jiang, L., Zhang, L., Zhou, P., Banerjee, S., Santiago, J.G., Kenny, T.W., and Goodson, K.E., 2001, "Modeling of Two-Phase Microchannel Heat Sinks for VLSI Chips", Proc. 14th IEEE Conference on MEMS 2001, Interlaken, Switzerland, Jan 21-25, pp. 422-426.

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Touzelbaev, M.N., and Goodson, K.E, 2001, “Impact of Experimental Timescale and Geometry on Thin-Film Thermal Property Measurements,” International Journal of Thermophysics, Vol. 22, pp. 243-263.

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Sverdrup, P.G., Ju, Y.S.,and Goodson, K.E., 2001, “Sub-Continuum Simulations of Heat Conduction in Silicon-on-Insulator Transistors,” ASME Journal of Heat Transfer, Vol. 123, pp. 30-37.

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2000

Fletcher, D.A., Crozier, K.B., Quate, C.F., Kino, K.S., Goodson, K.E., Simanovskii, D., and Palanker, D.V., 2000, “Near-Field Infrared Imaging with a Microfabricated Solid Immersion Lens,” Applied Physics Letters, Vol. 77, pp. 2109-2111.

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Durig, U., Cross, G., Despont, M., Drechsler, U., Haeberle, W., Lutwyche, M.I., Rothuizen, H., Stutz, R., Widmer, R., Vettiger, P., Binnig, G.K., King, W.P., and Goodson, K.E., 2000, “Millipede – An AFM Data Storage System at the Frontier of Nanotribology,” Tribology Letters, Vol. 9, pp. 25-32.

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Goodson, K.E., 2000, "Thermal Conduction in Electronic Microstructures," in the Thermal Engineering Handbook, F. Kreith, ed., CRC Press, Boca Raton, Florida, pp. 4.458 – 4.504.

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McConnell, A.D., Uma, S., and Goodson, K.E., 2000, "Thermal Conductivity of Doped Polysilicon Layers," Proc. International Conference on Heat Transfer and Transport Phenomena in Microscale Structures, G. P. Celata et al., eds., Begell House, New York, pp. 413-419.

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Zeighami, R.M., Laser, D., Zhou, P., Asheghi, M., Devasenathipathy, S., Kenny, T.W., Santiago, J.G., and Goodson, K.E., 2000, "Experimental Investigation of Flow Transition in Microchannels using Micron Resolution Particle Image Velocimetry," Proc. ITherm, Las Vegas, Nevada, May.

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Zhou, P., and Goodson, K.E., 2000, "Thermomechanical Diagnostics of BGA Packages using Digital Image/Speckle Correlation (DISC)," Proc. ITherm, Las Vegas, Nevada, May.

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Zhang, L., Koo, J.M., Jiang, L., Banerjee, S.S., Asheghi, M., Goodson, K.E., Santiago, J.G., Kenny, T.W., 2000, "Measurements and Modeling of Two-phase Flow in Mirochannels with Nearly-Constant Heat Flux Boundary Conditions," Proceedings of International Mechanical Engineering Congress & Exposition, Orlando, Florida, USA, November, pp. 129-135.

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Sverdrup, P. G., Banerjee, K., Dai, C., Shih, W.K., Dutton, R. W., and Goodson, K. E., 2000, "Sub-Continuum Thermal Simulations of Deep Sub-Micron Devices Under ESD Conditions," International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pp. 54-57.

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Zhang L., Banerjee S.S., Koo J.M., Laser D.J., Asheghi M., Goodson K.E., Santiago J.G., Kenny T.W., 2000, "A Micro Heat Exchanger with Integrated Heaters and Thermometers," Proc. Hilton Head Solid-State Sensor & Actuator Workshop, Hilton Head, South Carolina, June 4-8.

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King, W.P., Kenny, T.W., Goodson, K.E., Cross, G., Despont, M., Drechsler, U., Durig, U., Haberle, W., Lutwyche, M., Rothuizen, H., Stutz, R., Widmer, R., Binnig, G.K., and Vettiger, P. "Design of AFM Cantilevers for Combined Thermomechanical Data Writing and Reading," Proc. of the Hilton Head Solid-State Sensors and Actuators Workshop, pp. 1-5, 2000.

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Sverdrup, P.G., Tornblad, O., Banerjee, K., Yergeau, D., Yu, Z., Dutton, R.W., and Goodson, K.E., 2000, "Advanced Electro-Thermal Modeling and Simulation Techniques for Deep Sub-Micron Devices," Proc. TechCon, Phoenix, AZ, September 21-23.

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Tornblad, O., Sverdrup, P. G., Yergeau, D., Yu, Z., Goodson, K. E., and Dutton, R. W., 2000, "Modeling and Simulation of Phonon Boundary Scattering in PDE-based Device Simulators," Proc. International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pp. 58-61.

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K. Banerjee, D-Y Kim, A. Amerasekera, C. Hu, S. Wong, and K. E. Goodson, 2000, "Microanalysis of VLSI Interconnect Failure Modes under Short-Pulse Stress Conditions," Proceedings of the 38th Annual IEEE International Reliability Physics Symposium, April 10-13, San Jose, CA, pp. 283-288.

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K. Banerjee, A. Mehrotra, W. H. Hunter, K. C. Saraswat, K. E. Goodson, and S. Wong, 2000, "Quantitative Projections of Reliability and Performance for Low-k/Cu Interconnect Systems," Proc. of the 38th Annual IEEE International Reliability Physics Symposium, April 10-13, San Jose, CA, pp. 354-358.

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Fletcher, D.A., Crozier, K.B., Kino, G.S., Quate, C.F., and Goodson, K.E., 2000, "Scanning Refractive Microlens," Technical Digest of the Solid-State Sensor and Actuator Workshop, Hilton Head, SC, pp. 263-265.

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Fletcher, D.A., Simanovskii, D., Palanker, D.V., Crozier, K.B., Quate, C.F., Kino, G.S., and Goodson, K.E., 2000, "Microfabricated Solid Immersion Lens with Metal Aperture," Proc. IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii.

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1999

Zhou, P., and Goodson, K.E., 1999, "Diagnostics of FLIP-CHIP/BGA Structures using Phase-Shifting Speckle-Pattern Interferometry," Proc. Pacific Rim/ASME International Intersociety Electronic and Photonic Packaging Conference (InterPACK e99), Maui, Hawaii, June 13-19.

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Kurabayashi, K., and Goodson, K.E., 1999, “Impact of Molecular Orientation on Thermal Conduction in Spin-Coated Polyimide Films,” Journal of Applied Physics, Vol. 86, pp. 1925-1931.

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Ju, Y.S., and Goodson, K.E., 1999, “Phonon Scattering in Silicon Films of Thickness Below 100 nm,” Applied Physics Letters, Vol. 74, pp. 3005-3007.

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Kurabayashi, K., Asheghi, M., Touzelbaev, M.N., and Goodson, K.E., 1999, “Measurement of the Thermal Conductivity Anisotropy in Polyimide Films,” IEEE/ASME Journal of MicroElectroMechanical Systems, Vol. 8, pp. 180-191.

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Chui, B.W., Asheghi, M., Ju, Y.S., Goodson, K.E., Kenny, T.W., and Mamin, H.J., 1999, “Intrinsic-Carrier Thermal Runaway in Silicon Microcantilevers,” Microscale Thermophysical Engineering, Vol. 3, pp. 217-224.

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Ju, Y.S., and Goodson, K.E., 1999, “Process-Dependent Thermal Transport Properties of Silicon Dioxide Films Deposited using Low-Pressure Chemical Vapor Deposited,” Journal of Applied Physics, Vol. 85, pp. 7130-7134.

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Ju, Y.S., Kurabayashi, K., and Goodson K.E., 1999, “Thermal Characterization of Anisotropic Thin Dielectric Films using Harmonic Joule Heating,” Thin Solid Films, Vol. 339, pp. 160-164.

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Goodson, K.E., and Ju, Y.S., 1999, “Heat Conduction in Novel Electronic Films,” in the Annual Review of Materials Science, E.N. Kaufmann et al., eds., Annual Reviews, Palo Alto, CA, Vol. 29, pp. 261-293.

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Ju, Y.S., and Goodson, 1999, Book: "Microscale Heat Conduction in Integrated Circuits and their Constituent Films," Kluwer Academic Publishers, Boston.

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Chui, B.W., Asheghi, M., Ju, Y.S., Mamin, H.J., Goodson, K.E., and Kenny, T.W., 1999, "Measurement and Modeling of Thermal-Electrical Runaway in Silicon Cantilevers," Proceedings 10th International Conference on Solid State Sensors and Actuators, p. 1862.

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King, W.P., Santiago, J.G., Kenny, T.W., and Goodson, K.E., 1999, "Modeling and Simulation of Sub-Micrometer Heat Transfer in AFM Thermomechanical Data Storage," ASME MEMS-Vol. 1, pp. 583-588.

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Asheghi, M., W.P. King, W.P., Chui, B.W., Kenny, T.W., and Goodson, K.E., 1999, "Thermal Engineering of Doped Single-Crystal Silicon Microcantilevers for High Density Data Storage," Proceedings 10th International Conference on Solid State Sensors and Actuators. P. 1840 (1999)

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Goodson, K.E., "Microscale Thermal Engineering of Integrated Circuits," Proceedings of the Pacific Rim/ASME International Intersociety Electronic and Photonic Packaging Conference (InterPACK 99), Maui, Hawaii, June 13-19.

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Asheghi, M., Kurabayashi, K., Goodson, K.E., Kasnavi, R., and Plummer, J.D., 1999, "Thermal Conduction in Doped Silicon Layers," accepted for the 33rd ASME/AIChE National Heat Transfer Conference, Albuquerque, NM, August 8-14.

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Ju, Y.S., and Goodson, K.E., 1999, "Measurements of the Thermal Conductivity of Monocrystalline Silicon Films," accepted for the 33rd ASME/AIChE National Heat Transfer Conference, Albuquerque, NM, August 8-14.

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