Chu, D., Touzelbaev, M., Goodson, K.E., Babin, S., Pease, R.F., 2001, "Thermal Conductivity Measurements for Resist Thin Film," presented at the International Symposium on Electron, Ion and Photon Beam Technology and Nanofabrication, Washington DC.
Thermal Conductivity Measurements for Resist Thin Film
Chu, D., Touzelbaev, M., Goodson, K.E., Babin, S., Pease, R.F., 2001, "Thermal Conductivity Measurements for Resist Thin Film," presented at the International Symposium on Electron, Ion and Photon Beam Technology and Nanofabrication, Washington DC.