Chui, B.W., Goodson, K.E., Kenny, T.W., Mamin, H.J., Terris, B.D, and Rugar, D. "Micromachined heaters with 1-us thermal time constants for AFM thermomechanical data storage," Proceedings of the International Conference on Solid-state Sensors and Actuators, Transducers, Chicago, Illinois, June, 1997.

PDF