W.P. King, T.W. Kenny, K.E. Goodson, M. Despont, U. Duerig, M. Lantz, H. Rothuizen, G. Binnig, and P. Vettiger, 2002, "Microcantilevers for Thermal NanoImaging and Thermomechanical Surface Modification," Proceedings 2002 Workshop on Solid State Sensors, Actuators and Microsystems, Hilton Head, p. 210.

PDF