US Patent 9,583,702. Issued 2017. “Graphene-Inserted Phase Change Memory Device and Method of Fabricating the Same,” Y. Kim, C., Ahn, A. Sood, E. Pop, H-S- Wong, K.E. Goodson, S. Fong, S. Lee, C.M. Neumann, and M. Asheghi.
Abstract
Provided is a phase change memory device including a graphene layer inserted between a lower electrode into which heat flows and a phase change material layer, to prevent the heat from being diffused to an outside so as to efficiently transfer the heat to the phase change material layer, and a method of fabricating the phase change memory device. The phase change memory device includes a lower electrode; an insulating layer formed to enclose the lower electrode; a graphene layer formed on the lower electrode; a phase change material layer formed on the graphene layer and the insulating layer; and an upper electrode formed on the phase change material layer. Since a phase of the phase change material layer is changed at a small amount of driving current, the phase change memory device is fabricated to have a high driving speed and a high integration.