Solid-Layer Thermal-Conductivity Measurement Techniques

Goodson, K.E., and Flik, M.I., 1994, "Solid-Layer Thermal-Conductivity Measurement Techniques," Applied Mechanics Reviews, Vol. 47, pp. 101-112.

Download PDF

The thermal conductivities of solid layers of thicknesses from 0.01 to 100 urn affect the performance and reliability of electronic circuits, laser systems, and microfabricated sensors. This work reviews techniques that measure the effective thermal conductivity along and normal to these layers. Recent measurements using microfabricated experimental structures show the importance of measuring the conductivities of layers that closely resemble those in the application. Several promising non-contact techniques use laser light for heating and infrared detectors for temperature measurements. For transparent layers these methods require optical coatings whose impact on the measurements has not been determined. There is a need for uncertainty analysis in many cases, particularly for those techniques which apply to very thin layers or to layers with very high conductivities.

Related Projects

With the scaling of silicon nanotransistors into the deep submicrometer regime, a variety of compounding factors are increasing the temperature rise in the multilevel interconnect systems in modern...
Heat conduction in polymer thin films and related deformation phenomena play a central role in modern manufacturing technologies, semiconductor processing, and data storage. Applications range from...
Synthetic diamond films are promising for a broad variety of engineering applications incuding wear-resistance coatings, semiconductor passivation, and high-temperature electronics. Diamond enjoys...
The basic physics of phonon conduction in dielectrics and semiconductors has been the focus of research for more than a century. However, recent improvements in nanofabrication technologies have...
A variety of modern high-power electronic devices are based on high electron mobility transistors (HEMT) and generate enormous heat fluxes that can approach tens of kW/cm2. The overall power...
The most innovative energy conversion technologies, ranging from solar and thermoelectrics to lasers (which convert electric energy to light), are benefitting from nanostructures and/or...